3M™ Betapure™ AUL Series Filter Cartridge

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Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification

Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction

The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

Overall Diameter (Metric)

Overall Length (Metric)

Membrane Micron Rating

Gasket/O-ring Material

End Configuration

Maximum Operating Temperature (Celsius)

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Details

Highlights

Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Specifications

Details

Brands	Betapure™
End Configuration	222 O-Ring & Flat Cap, Double Open End (DOE)
End Modification	Double Open End, with Valora Polyolefin Foam end caps., 222 connector, flat cap and EPR o-rings.
Gasket/O-ring Material	Polyethylene, EPR
Industries	Industrial
Maximum Operating Temperature (Celsius)	40 ℃, 80 ℃
Media Material	Polyethylene: Polypropylene Bi-component Fiber & Glass Fiber
Media Technology	Non-woven
Media Type	Depth
Membrane Micron Rating	0.7 μm, 70 μm
Product Series	AUL
Series	Betapure™ AUL Series
Units per Case	15.0, 30.0

Dimensions and Classifications

Overall Diameter (Metric)	7.42 cm, 74.168 mm
Overall Length (Metric)	12.7 cm, 24.765 cm, 25.4 cm, 50.8 cm, 76.2 cm
Overall Width (Metric)	7.416 cm

Legal disclaimer

Picture shown is representative of the product family. Actual product may differ from the picture including end modification, presence or absence of gaskets, number or cells, length, number of rounds of housing, inlet/outlet type of housing, filter configuration,appearance etc . Actual product will be as per part number or model number and associated specifications in catalog.