3M™ Diamond Pad Conditioner A165, 4.25-in dia
- Part Number A165
- 3M ID 60020015859
Details
Highlights
- Optimized for extended pad and disk life
- Longer pad and disk life helps customers reduce the number of maintenance shutdowns, increasing their potential for lower cost of ownership
- Diamonds secured with both chemical and mechanical bonds for great retention
- Exclusive polymer substrate enhances corrosion resistance
- Customizable for conditioning aggressiveness
- Tight flatness specification for 3M disks enhances pad wear uniformity and pad planarity
3M™ Diamond Pad Conditioners are highly engineered chemical mechanical planarization (CMP) pad conditioners that deliver reliable performance for critical semiconductor CMP applications.
Refresh your CMP pad surfaces with 3M™ Diamond Pad Conditioners. They also minimize wear and maintain consistent asperities and consistent pad performance — for wafer after wafer. CMP pad conditioners from 3M utilize sintered abrasive technology for excellent diamond retention for longer life, with controlled diamond placement and protrusion. Their single-layered diamond grid with highly controlled spacing enables you to better predict and optimize your CMP pad usage, for better planarization efficiency.
Specifications
| Abrasive Working Surface | Full Face |
| Applications | Advanced Node (Memory & Logic), Wafer Manufacturing, Hard Disk Drive Manufacturing, CMP |
| Brands | 3M™ |
| CMP Process | Cu (Bulk), W (Bulk), STI Process, PMD/ILD |
| Carrier Diameter (Metric) | 107.95 mm |
| Carrier Form | Disc (Beveled Edge) |
| Carrier Material | 304 Stainless Steel |
| Diamond Size | 251 micron |
| Mineral Type | Nickel-based Alloy with Patterned Diamond |
| Product Series | A165 |
| Product Type | Diamond Pad Conditioner |
Resources
Diamond Pad Conditioner FlyerFlyers
(PDF, 384KB)
Similar products
| Carrier Diameter (Metric) | 107.95 mm | ||
| CMP Process | Cu (Bulk), W (Bulk), STI Process, PMD/ILD | ||
| Diamond Size | 251 micron |
3M™ Diamond Pad Conditioner A165, 4.25-in dia
3M™ CMP Pad Conditioner Brush
3M™ Trizact™ Pad Conditioner